

The Master of Science in Micro- and Nanotechnologies is a specialised international graduate program that provides advanced scientific and technical training in nanosystems, nanomaterials, semiconductor technologies, and modern measurement methods. Designed for students seeking to deepen their expertise, this full-time degree combines theoretical foundations with intensive practical experience in cutting-edge research environments. Through interdisciplinary coursework and laboratory-based learning, students gain essential skills relevant to modern nanoengineering, optics, materials science, and life-science applications. The program spans four semesters and admits students exclusively in the winter semester.
Located in Ilmenau, a centre for engineering innovation and applied research, this master's program emphasises both technological excellence and hands-on scientific practice. With a strong focus on experimental methods, applied nanofabrication, and interdisciplinary collaboration, students develop advanced competencies that prepare them for international research and industry careers. The course reflects Germany’s strength in engineering education and its close connection to high-tech industries, making it an excellent choice for those aiming to specialize in micro- and nanotechnologies for global scientific and technological applications.
Semester 1 – Foundations of Micro- and Nanotechnologies
Semester 2 – Advanced Nanotechnology Applications
Semester 3 – Specialization & Research Skills
Semester 4 – Master’s Thesis
Graduates are prepared for careers in semiconductor industries, materials development, micro- and nanofabrication, optical technologies, metrology, life-science technology, and research institutions. The program also provides an excellent foundation for doctoral studies or scientific work in advanced nanotechnology fields.
This program offers a strong scientific foundation combined with hands-on training in state-of-the-art nanotechnology, making it ideal for students aiming to work at the forefront of innovation. It provides direct exposure to cutting-edge research environments and high-tech laboratories.
With interdisciplinary modules, modern facilities, and strong research networks, the program supports both academic and professional growth while preparing graduates for competitive international careers in micro- and nanotechnology.
TU Ilmenau – Student Advisory Service
Am Helmholtzring 1 (Haus M)
98693 Ilmenau, Germany
Tel: +49 3677 / 69-2021
Fax: +49 3677 / 69-1743
Email: studienberatung@tu-ilmenau.de
International Office – TU Ilmenau
Max-Planck-Ring 14
98693 Ilmenau, Germany
Tel: +49 3677 / 69-2518
Fax: +49 3677 / 69-1771
Email: internationaloffice@tu-ilmenau.de
Programme Contact
Univ.-Prof. Dr.-Ing. Jens Müller
Email: jens.mueller@tu-ilmenau.de