Main building of Ilmenau University of Technology, featuring modern architecture and campus green spaces in Ilmenau, Germany.
Master of Science
On Campus
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Ilmenau University of Technology
Ilmenau
Germany

Micro- and nanotechnologies

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About

The Master of Science in Micro- and Nanotechnologies is a specialised international graduate program that provides advanced scientific and technical training in nanosystems, nanomaterials, semiconductor technologies, and modern measurement methods. Designed for students seeking to deepen their expertise, this full-time degree combines theoretical foundations with intensive practical experience in cutting-edge research environments. Through interdisciplinary coursework and laboratory-based learning, students gain essential skills relevant to modern nanoengineering, optics, materials science, and life-science applications. The program spans four semesters and admits students exclusively in the winter semester.

Located in Ilmenau, a centre for engineering innovation and applied research, this master's program emphasises both technological excellence and hands-on scientific practice. With a strong focus on experimental methods, applied nanofabrication, and interdisciplinary collaboration, students develop advanced competencies that prepare them for international research and industry careers. The course reflects Germany’s strength in engineering education and its close connection to high-tech industries, making it an excellent choice for those aiming to specialize in micro- and nanotechnologies for global scientific and technological applications.

Key information

Duration
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Tuition fee
$0.00/year
Start dates & application deadlines
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More details
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Key Facts

  • Degree: Master of Science (M.Sc.)
  • Standard period of study: 4 semesters
  • Location: Ilmenau
  • Study type: Graduate (full time, international)
  • Admission semester: Winter semester only
  • Area of study: Nanoanalysis, Nanochemistry, Nanoelectronics, Nanomaterials, Nanotechnology, Nanosciences
  • Admission modus: Without admission restriction
  • Main language: English

Program Structure

Semester 1 – Foundations of Micro- and Nanotechnologies

  • Fundamentals of Nanoscience
  • Materials Engineering Basics
  • Experimental Methods and Nanometrology
  • Laboratory Modules

Semester 2 – Advanced Nanotechnology Applications

  • Semiconductor Technology
  • Nanosystems and Life-Science Applications
  • Optical and Microoptical Systems
  • Project Work I

Semester 3 – Specialization & Research Skills

  • Laser Metrology and Advanced Measurement Systems
  • Functional Nanomaterials
  • Computational Methods in Nanoscience
  • Project Work II

Semester 4 – Master’s Thesis

  • Independent Research Project
  • Thesis Defence & Presentation

Career Opportunities

Graduates are prepared for careers in semiconductor industries, materials development, micro- and nanofabrication, optical technologies, metrology, life-science technology, and research institutions. The program also provides an excellent foundation for doctoral studies or scientific work in advanced nanotechnology fields.

Why Choose This Program

This program offers a strong scientific foundation combined with hands-on training in state-of-the-art nanotechnology, making it ideal for students aiming to work at the forefront of innovation. It provides direct exposure to cutting-edge research environments and high-tech laboratories.

With interdisciplinary modules, modern facilities, and strong research networks, the program supports both academic and professional growth while preparing graduates for competitive international careers in micro- and nanotechnology.

Contact Information

TU Ilmenau – Student Advisory Service
Am Helmholtzring 1 (Haus M)
98693 Ilmenau, Germany
Tel: +49 3677 / 69-2021
Fax: +49 3677 / 69-1743
Email: studienberatung@tu-ilmenau.de

International Office – TU Ilmenau
Max-Planck-Ring 14
98693 Ilmenau, Germany
Tel: +49 3677 / 69-2518
Fax: +49 3677 / 69-1771
Email: internationaloffice@tu-ilmenau.de

Programme Contact
Univ.-Prof. Dr.-Ing. Jens Müller
Email: jens.mueller@tu-ilmenau.de