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Master of Science
On Campus
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ETH Zurich - Swiss Federal Institute of Technology
Switzerland

Micro and Nanosystems

About

The Master of Science in Micro and Nanosystems at ETH Zurich - Swiss Federal Institute of Technology is a 1.5-year, full-time on-campus program that focuses on the design, analysis, and fabrication of systems at micro and nanoscales. The program integrates mechanical engineering, electrical engineering, materials science, and physics to study areas such as microfabrication, nanotechnology, sensors, and microelectromechanical systems (MEMS). Students develop strong interdisciplinary skills to work with advanced technologies at extremely small scales.

Graduates are well-prepared for high-tech engineering careers in semiconductor industries, medical device companies, robotics, and research laboratories, as well as for doctoral studies. With a strong emphasis on nanoscale systems and microengineering technologies, the program equips students with the expertise needed to develop next-generation miniaturized devices and intelligent systems.

Key Facts

Program Details
Degree: Master of Science
Location: Switzerland
Academic Information
Area of study: Industrial & Systems Engineering
Study Format
Study Type: On Campus
Format: Full-time
Language
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Program Structure

Semester 1 – Foundations in Micro and Nanosystems

  • Introduction to Microelectronics and Nanotechnology
  • Microfabrication and Materials for Nanosystems
  • Research Methods in Micro and Nanosystems

Semester 2 – Advanced Micro and Nanosystems

  • Nano-optics and Nanophotonics
  • MEMS (Micro-Electro-Mechanical Systems) and NEMS
  • Seminar: Applications of Micro and Nanosystems in Industry

Semester 3 – Master’s Thesis & Research Project

  • Independent Research / Thesis
  • Data Analysis in Micro and Nanosystems
  • Final Presentation & Research Portfolio Development

Career Opportunities

Graduates of the Micro and Nanosystems Master’s program are well-prepared for careers in nanotechnology, semiconductor design, MEMS (Microelectromechanical Systems), and microfabrication. They can work as microsystem engineers, nanoelectronics researchers, semiconductor developers, and R&D specialists. With the increasing application of micro and nanosystems in technology, healthcare, and manufacturing, graduates have strong career prospects in the electronics, biomedical, and materials industries.

Why Choose This Program

The Micro and Nanosystems program focuses on the design and application of miniature systems and devices at the micro and nanoscale. Students gain expertise in nanofabrication techniques, materials science, and system integration, preparing them for cutting-edge roles in the development of microelectromechanical devices and semiconductor technologies. The program emphasizes both hands-on laboratory work and theoretical learning, ensuring that graduates are ready to contribute to advancements in micro and nanosystem technologies.

Contact Information

For further information, please contact the admissions office at:
Phone: +41 44 632 11 11
Email: studiensekretariat@ethz.ch
Address: ETH Zurich - Swiss Federal Institute of Technology, Raemistrasse 101, 8092 Zurich, Switzerland

Duration
-
Tuition fee
$1,852.00/year
Location
Switzerland
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