

The Master of Science in Micro and Nanosystems at ETH Zurich - Swiss Federal Institute of Technology is a 1.5-year, full-time on-campus program that focuses on the design, analysis, and fabrication of systems at micro and nanoscales. The program integrates mechanical engineering, electrical engineering, materials science, and physics to study areas such as microfabrication, nanotechnology, sensors, and microelectromechanical systems (MEMS). Students develop strong interdisciplinary skills to work with advanced technologies at extremely small scales.
Graduates are well-prepared for high-tech engineering careers in semiconductor industries, medical device companies, robotics, and research laboratories, as well as for doctoral studies. With a strong emphasis on nanoscale systems and microengineering technologies, the program equips students with the expertise needed to develop next-generation miniaturized devices and intelligent systems.
Semester 1 – Foundations in Micro and Nanosystems
Semester 2 – Advanced Micro and Nanosystems
Semester 3 – Master’s Thesis & Research Project
Graduates of the Micro and Nanosystems Master’s program are well-prepared for careers in nanotechnology, semiconductor design, MEMS (Microelectromechanical Systems), and microfabrication. They can work as microsystem engineers, nanoelectronics researchers, semiconductor developers, and R&D specialists. With the increasing application of micro and nanosystems in technology, healthcare, and manufacturing, graduates have strong career prospects in the electronics, biomedical, and materials industries.
The Micro and Nanosystems program focuses on the design and application of miniature systems and devices at the micro and nanoscale. Students gain expertise in nanofabrication techniques, materials science, and system integration, preparing them for cutting-edge roles in the development of microelectromechanical devices and semiconductor technologies. The program emphasizes both hands-on laboratory work and theoretical learning, ensuring that graduates are ready to contribute to advancements in micro and nanosystem technologies.
For further information, please contact the admissions office at:
Phone: +41 44 632 11 11
Email: studiensekretariat@ethz.ch
Address: ETH Zurich - Swiss Federal Institute of Technology, Raemistrasse 101, 8092 Zurich, Switzerland